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HINDHIVAC Laser
Ablation unit is specially designed for evaporation of
special material under high vacuum condition with the
help of laser beam Source, Since the laser beam is the
cleanest source for heating the material, the thin film
produced will have high purity compared to thin films
produced by conventional evaporation methods.
The Laser Ablation unit and the gadgetries inside
chamber are carefully designed using quartz window for
laser beam entry at 45°
angle to the target. Target holder is made to rotate on
its axis for uniform erosion of the material. Opposite
to the evaporation target, substrate holder with heating
facility is provided for heating the substrate to 900°C.
The chamber with gadgetries is evacuated to a vacuum of
10-6 m.bar range using HINDHIVAC high-speed
vacuum pumping system.
The equipment is complete with the chamber gadgetries
high vacuum system control instruments with measuring
gauges. Required safety interlocks is built in the
system to protect system and the operator. |
