This
is a cold cathode Ionisation gauge consisting of two
electrodes anode and cathode. A potential difference of
about 2.2 KV is applied between anode and cathode
through current limiting resistors. A magnetic field is
introduced at right angles to the plane of the
electrodes by a permanent magnet having nearly 800 gauss
magnetic field which will increase the ionisation
current. The electrons emitted from the cathode (gauge
head body) of the gauge head are deflected by means of
magnetic field applied at right angles to the plane of
the electrodes and are made to take helical path before
reaching the anode loop. Thus following very long path,
the chance of collision with gas molecule is high even
at low pressures.
The
secondary electrons produced by ionisation themselves
perform similar oscillations and the rate of ionisation
increases rapidly. Eventually, the electrons are
captured by the anode and equilibrium is reached when
the number of electrons produced per second by
ionisation is the sum of positive ion current to the
cathode and the electron current to the anode and is
used to measure the pressure of the gas. This instrument
with the sensor having wider range of applications, in
high vacuum systems where the final Vacuum to be
measured in process chamber.
These
instruments can be used in high vacuum systems, coating
units, sputtering units, vacuum furnaces and many other
applications where high vacuum to be measured in the
range of 10-2 to 10-6
m.bar.
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